Kinetics and morphology of GaAs etching in aqueous CrO3-HF solutions

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1986-04, Vol.133 (4), p.799-806
Main Authors: VAN DE VEN, J, WEYHER, J. L, VAN DEN MEERAKKER, J. E. A. M, KELLY, J. J
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Defects and impurities in crystals
microstructure
Exact sciences and technology
Physics
Structure of solids and liquids
crystallography
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2108680