The mechanism of GaAs etching in CrO3-HF solutions. I: Experimental results

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1985-12, Vol.132 (12), p.3020-3026
Main Authors: VAN DE VEN, J, VAN DEN MEERAKKER, J. E. A. M, KELLY, J. J
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Solid-fluid interfaces
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2113715