The mechanism of GaAs etching in CrO3-HF solutions. I: Experimental results

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Published in:Journal of the Electrochemical Society 1985-12, Vol.132 (12), p.3020-3026
Main Authors: VAN DE VEN, J, VAN DEN MEERAKKER, J. E. A. M, KELLY, J. J
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Solid-fluid interfaces
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
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container_issue 12
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container_title Journal of the Electrochemical Society
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creator VAN DE VEN, J
VAN DEN MEERAKKER, J. E. A. M
KELLY, J. J
description
doi_str_mv 10.1149/1.2113715
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ispartof Journal of the Electrochemical Society, 1985-12, Vol.132 (12), p.3020-3026
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source Institute of Physics:Jisc Collections:IOP Publishing Read and Publish 2024-2025 (Reading List)
subjects Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Solid-fluid interfaces
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
title The mechanism of GaAs etching in CrO3-HF solutions. I: Experimental results
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