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Secondary electron effect on electric potential of insulator surface during ion implantation

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1985-01, Vol.132 (3), p.680-684
Main Authors: YOSHIZAWA, M, MIYAKE, M, HARADA, H, KIUCHI, K, TAZAWA, S
Format: Article
Language:English
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2113930