Loading…

The influence of high pressure oxidation on boron redistribution in LOCOS structures

Saved in:

Bibliographic Details
Published in:	Journal of the Electrochemical Society 1984-01, Vol.131 (6), p.1418-1423
Main Authors:	DEROUX-DAUPHIN, P, GONCHOND, J. P
Format:	Article
Language:	English
Subjects:	Applied sciences Electronics Exact sciences and technology Microelectronic fabrication (materials and surfaces technology) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Citations:	Items that cite this one
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!