Contact hole formation in integrated circuits using ion beam nitriding

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1983-01, Vol.130 (11), p.2293-2295
Main Authors: BHAGAT, J. K, TROXELL, J. R
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2119572