Single Crystal Silicon Films on Amorphous Insulators: Growth by Lateral Nucleated Epitaxy Using Scanning Laser and Electron Beams and Evaluation by Electron Backscattering Contrast

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1982-12, Vol.129 (12), p.2802-2808
Main Authors: Sedgwick, T. O., Geiss, R. H., Depp, S. W., Hanchett, V. E., Huth, B. G., Graf, V., Silvestri, V. J.
Format: Article
Language:English
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2123682