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Cathodic Deposition of Amorphous Alloys of Silicon, Carbon, and Fluorine
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Published in: | Journal of the Electrochemical Society 1982-05, Vol.129 (5), p.936-942 |
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Main Authors: | , |
Format: | Article |
Language: | English |
Citations: | Items that cite this one |
Online Access: | Get full text |
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ISSN: | 0013-4651 1945-7111 |
DOI: | 10.1149/1.2124069 |