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Cathodic Deposition of Amorphous Alloys of Silicon, Carbon, and Fluorine

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1982-05, Vol.129 (5), p.936-942
Main Authors: Lee, C. H., Kröger, F. A.
Format: Article
Language:English
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2124069