Loading…

Thermal Oxidation of Phosphorus‐Doped Polycrystalline Silicon in Wet Oxygen

Saved in:

Bibliographic Details
Published in:	Journal of the Electrochemical Society 1978-06, Vol.125 (6), p.892-897
Main Author:	Sunami, Hideo
Format:	Article
Language:	English
Citations:	Items that cite this one
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!