Poly (Fluoro Methacrylate) as Highly Sensitive, High Contrast Positive Resist

Saved in:
Bibliographic Details
Published in:Journal of the Electrochemical Society 1977-10, Vol.124 (10), p.1648-1651
Main Authors: Kakuchi, Masami, Sugawara, Shungo, Murase, Kei, Matsuyama, Kentaro
Format: Article
Language:English
Citations: Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0013-4651
1945-7111
DOI:10.1149/1.2133127