Characteristics of Amorphous Bi[sub 2]Ti[sub 2]O[sub 7] Thin Films Grown by Atomic Layer Deposition for Memory Capacitor Applications

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2006, Vol.153 (1), p.F20
Main Authors: Hwang, Gyu Weon, Kim, Wan Don, Min, Yo-Sep, Cho, Young Jin, Hwang, Cheol Seong
Format: Article
Language:English
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ISSN:0013-4651
DOI:10.1149/1.2133713