Geometrical effects in the electroless metallization of fine metal patterns

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1993-08, Vol.140 (8), p.2221-2228
Main Authors: VAN DER PUTTEN, A. M. T, DE BAKKER, J. W. G
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2220799