Neural network models for thermally based microelectronic manufacturing processes

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1993, Vol.140 (8), p.2287-2293
Main Authors: MAHAJAN, R. L, WANG, X. A
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2220810