Thickness dependence of charge-trapping properties in ultrathin thermal oxides prepared by rapid thermal oxidation

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1993-02, Vol.140 (2), p.L16-L19
Main Authors: LO, G. Q, KWONG, D. L, ABBOTT, K. J, NAZARIAN, D
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures
Electronic transport in interface structures
Exact sciences and technology
Physics
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2221092