Deposition of Bi[sub 4−x]Nd[sub x]Ti[sub 3]O[sub 12] Films with Direct Liquid Injection Metallorganic Chemical Vapor Deposition and Characterization of Ferroelectric Properties

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2006, Vol.153 (11), p.G992
Main Authors: Song, Moon-Kyun, Rhee, Shi-Woo
Format: Article
Language:English
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ISSN:0013-4651
DOI:10.1149/1.2347107