Brittle and Ductile Fracture Mechanics Analysis of Surface Damage Caused During CMP

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2007, Vol.154 (3), p.H239
Main Authors: Ring, Terry A., Feeney, Paul, Boldridge, David, Kasthurirangan, Jaishankar, Li, Shoutian, Dirksen, James A.
Format: Article
Language:English
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ISSN:0013-4651
DOI:10.1149/1.2426877