Brittle and Ductile Fracture Mechanics Analysis of Surface Damage Caused During CMP

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Published in:Journal of the Electrochemical Society 2007, Vol.154 (3), p.H239
Main Authors: Ring, Terry A., Feeney, Paul, Boldridge, David, Kasthurirangan, Jaishankar, Li, Shoutian, Dirksen, James A.
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Language:English
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creator Ring, Terry A.
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title Brittle and Ductile Fracture Mechanics Analysis of Surface Damage Caused During CMP
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