Effect of Bridging Groups of Precursors on Modulus Improvement in Plasma-Enhanced Copolymerized Low-k Films

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2007, Vol.154 (3), p.H198
Main Authors: Kawahara, Jun, Kunimi, Nobutaka, Nakano, Akinori, Kinoshita, Keizo, Hayashi, Yoshihiro, Komatsu, Masashi, Seino, Yutaka, Ichikawa, Rie, Takasu, Yuko, Kikkawa, Takamaro
Format: Article
Language:English
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ISSN:0013-4651
DOI:10.1149/1.2429048