Pinhole Defect Density of CrN[sub x] Thin Films Formed by Ion-Beam-Enhanced Deposition on Stainless Steel Substrates

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2007, Vol.154 (4), p.C189
Main Authors: Goto, Hiroshi, Akao, Noboru, Hara, Nobuyoshi, Sugimoto, Katsuhisa
Format: Article
Language:English
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ISSN:0013-4651
DOI:10.1149/1.2433041