High-Density Silicon Nanocrystal Formed on Nitrided Tunnel Oxide for Nonvolatile Memory Application

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Bibliographic Details
Published in:Electrochemical and solid-state letters 2008, Vol.11 (6), p.H131
Main Authors: Wu, Yung-Hsien, Kao, Chien-Kang, Wang, Chun-Yao, Lin, Yuan-Sheng, Chang, Chih-Ming, Chuang, Chih-Hsiang, Lee, Chia-Yun, Kuo, Chia-Ming, Ku, Alex
Format: Article
Language:English
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ISSN:1099-0062
DOI:10.1149/1.2895018