The Device-Technological Simulation of The Field-Emission Micro-Cathodes Based on Three-Dimensional Soi-Structures

The two methods of the formation of the silicon-on-insulator (SOI) local structures have been proposed. The first one is based on the stimulated lateral epitaxial growth and planarization of Si mono-crystal film. The second one is based on local thermal oxidation of Si buried layer through horizonta...

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Main Authors: Druzhynin, Anatolij, Holota, Victor, Kohut, Igor, Sapon, Sergij, Khoverko, Yurij
Format: Conference Proceeding
Language:English
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Holota, Victor
Kohut, Igor
Sapon, Sergij
Khoverko, Yurij
description The two methods of the formation of the silicon-on-insulator (SOI) local structures have been proposed. The first one is based on the stimulated lateral epitaxial growth and planarization of Si mono-crystal film. The second one is based on local thermal oxidation of Si buried layer through horizontal tunnels. The obtained SOI-structures are used in a base matrix crystal fabrication technology for the construction of micro-systems. It is proposed to add to elements of a base crystal of a matrix of cells of field emission micro-cathodes with control circuits. The fabrication technology and the layout of a field emission micro-cathode cell with control high-voltage SOI MOS-transistor has been developed. The computer simulation of high-voltage SOI MOS-transistor static characteristics has been performed.
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title The Device-Technological Simulation of The Field-Emission Micro-Cathodes Based on Three-Dimensional Soi-Structures
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