Optimization of Growth Parameters in Electron-Beam-Induced Orientation Selective Epitaxy of CeO[sub 2](100)∕Si(100) Structures

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2008, Vol.155 (11), p.G237
Main Authors: Inoue, T., Ohtake, H., Otani, J., Shida, S.
Format: Article
Language:eng ; jpn
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ISSN:0013-4651
DOI:10.1149/1.2975822