Effect of 2-Mercapto-5-benzimidazolesulfonic Acid in Superconformal Cu Electroless Deposition

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2009, Vol.156 (6), p.D207
Main Authors: Lee, Chang Hwa, Kim, Ae Rim, Koo, Hyo-Chol, Kim, Jae Jeong
Format: Article
Language:English
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ISSN:0013-4651
DOI:10.1149/1.3117343