Measurements of Dislocation Locking by Near-Surface Ion-Implanted Nitrogen in Czochralski Silicon

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2009, Vol.156 (8), p.H669
Main Authors: Alpass, C. R., Jain, A., Murphy, J. D., Wilshaw, P. R.
Format: Article
Language:English
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ISSN:0013-4651
DOI:10.1149/1.3151813