Site-Selective Metal Patterning/Metal-Assisted Chemical Etching on GaAs Substrate Through Colloidal Crystal Templating

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2009, Vol.156 (10), p.H777
Main Authors: Yasukawa, Yukiko, Asoh, Hidetaka, Ono, Sachiko
Format: Article
Language:English
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ISSN:0013-4651
DOI:10.1149/1.3187239