Study of CMOS-compatible Copper Etching for Organic Coating

Biosensors based on advanced CMOS processing have copper surfaces. These copper surfaces have to be functionalized with biological receptors to allow bio-sensing. The cleaning of the CMOS copper interface is therefore a critical step to allow good attachment and formation of self-assembled monolayer...

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Bibliographic Details
Main Authors: Lambert, Magali, Rostam-Khani, Patrick, Ten Veen, Jacoline, Van Nimwegen, Leon, Frederix, Filip
Format: Conference Proceeding
Language:English
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Summary:Biosensors based on advanced CMOS processing have copper surfaces. These copper surfaces have to be functionalized with biological receptors to allow bio-sensing. The cleaning of the CMOS copper interface is therefore a critical step to allow good attachment and formation of self-assembled monolayers of thiol-molecules. Different cleaning procedures were tested and evaluated in terms of roughness (by atomic force microscopy AFM), oxide formation and contamination (by time of flight - secondary ion mass spectrometry TOF-SIMS). The quality of the deposited self-assembled monolayer was assessed by x-ray photoelectron spectroscopy (XPS) and by grazing-angle Fourier transform infrared spectroscopy (GA-FTIR). The optimal cleaning treatment for the formation of a well-ordered octadecanethiol monolayer was obtained with an etching of 5 minutes in 3.7% HCl.
ISSN:1938-5862
1938-6737
DOI:10.1149/1.3202635