Analysis of Scratches Formed on Oxide Surface during Chemical Mechanical Planarization

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2010, Vol.157 (2), p.H186
Main Authors: Choi, Jae-Gon, Prasad, Y. Nagendra, Kim, In-Kwon, Kim, In-Gon, Kim, Woo-Jin, Busnaina, Ahmed A., Park, Jin-Goo
Format: Article
Language:English
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ISSN:0013-4651
DOI:10.1149/1.3265474