Synthesis and Characterization of Nanoporous TiO 2 Films on Silicon Substrates for Solar Cells Applications

Nanoporous titanium oxide layers were prepared by anodization of titanium thin films deposited on silicon substrate by sputtering, using a mixture of ammonium fluoride and ethylene - glycol as electrolyte. The dependence of pore morphology and pore formation rate on process parameters was evaluated....

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Bibliographic Details
Published in:ECS transactions 2010-02, Vol.25 (15), p.57-63
Main Authors: Manea, Elena C., Obreja, Cosmin, Popescu, Alina, Purica, Munizer, Schiopu, Veronica, Staicu, Liliana, Comanescu, Florin, Parvulescu, Catalin
Format: Article
Language:English
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Summary:Nanoporous titanium oxide layers were prepared by anodization of titanium thin films deposited on silicon substrate by sputtering, using a mixture of ammonium fluoride and ethylene - glycol as electrolyte. The dependence of pore morphology and pore formation rate on process parameters was evaluated. The influence of anodization conditions (e.g. electrolyte composition, current density, pH, time and temperature) on the structure and morphology of the oxide layer and the changes induced by the heat treatment, were also investigated by SEM, FTIR, Raman spectroscopy and X - ray diffraction.
ISSN:1938-5862
1938-6737
DOI:10.1149/1.3300422