A Model-Based Analysis of Plasma Parameters and Composition in HBr/X (X=Ar, He, N[sub 2]) Inductively Coupled Plasmas

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2010, Vol.157 (5), p.H574
Main Authors: Kwon, Kwang-Ho, Efremov, Alexander, Kim, Moonkeun, Min, Nam Ki, Jeong, Jaehwa, Kim, Kwangsoo
Format: Article
Language:English
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ISSN:0013-4651
DOI:10.1149/1.3362943