Fabrication of Ordered Trench Structures with High Aspect Ratios by Anisotropic Anode Etching of Al(100)

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Bibliographic Details
Published in:Electrochemical and solid-state letters 2010, Vol.13 (7), p.C17
Main Authors: Fukushima, Tatsuro, Takeda, Akifumi, Nishio, Kazuyuki, Masuda, Hideki
Format: Article
Language:English
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ISSN:1099-0062
DOI:10.1149/1.3388511