Thin Film Ag Masking for Deep Glass Micromachining

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Bibliographic Details
Published in:Electrochemical and solid-state letters 2010, Vol.13 (11), p.H399
Main Authors: Lee, Hing Wah, Bien, Daniel C. S., Badaruddin, Siti Aishah Mohamad, Teh, Aun Shih
Format: Article
Language:English
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ISSN:1099-0062
DOI:10.1149/1.3483163