Development of a Nonperiodic Boundary Practical Simulator for Oxide and Shallow Trench Isolation Chemical Mechanical Polishing Processes

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2011, Vol.158 (2), p.H142
Main Authors: Ohtake, Atsushi, Arai, Toshiyuki, Kurokawa, Syuhei, Doi, Toshiro
Format: Article
Language:English
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ISSN:0013-4651
DOI:10.1149/1.3519133