Electrochemical Mechanical Removal of Ta Films in Dihydroxybenzene Sulfonic Acid Solutions Containing Potassium Iodate

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Bibliographic Details
Published in:Electrochemical and solid-state letters 2011, Vol.14 (4), p.H156
Main Authors: Govindarajan, R., Siddiqui, S., Keswani, M., Raghavan, S., Singh, D. R. P., Chawla, N.
Format: Article
Language:English
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ISSN:1099-0062
DOI:10.1149/1.3535269