Chemical Bonding Analysis of HCl Pretreatment on the Omnidirectional Silicon Solar Cells with Microspherical Texture/ITO Stacks

A surface texturing based on nozzle-sprayed microspheres and spin-coated dielectric film was prepared for the purpose of omnidirectional light-trapping. An indium tin oxide (ITO) was applied as the antireflection coating (ARC). From the XPS results, the inter-diffusions of Si, O, and In atoms at ITO...

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2011-01, Vol.158 (5), p.B481-B484
Main Authors: Chen, Chun-Heng, Juan, Pi-Chun, Hwang, Huey-Liang
Format: Article
Language:English
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Summary:A surface texturing based on nozzle-sprayed microspheres and spin-coated dielectric film was prepared for the purpose of omnidirectional light-trapping. An indium tin oxide (ITO) was applied as the antireflection coating (ARC). From the XPS results, the inter-diffusions of Si, O, and In atoms at ITO/Si junction are suppressed by the HCl pretreatment. The cell efficiency (η) with varying light incident angles from 0 to 60° was improved. Due to lack of oxygen atom at the ITO/Si interface with pretreatment, the sub-peak intensity ratio of binding energies at 531.9–530.4 eV becomes larger. The enhanced current transport with respect to the binding energy of O – state was studied. The oxygen vacancy at the silicon surface plays an important role in short circuit current ( J SC ) and efficiency for the omnidirectional silicon solar cells.
ISSN:0013-4651
1945-7111
DOI:10.1149/1.3559158