Optimized Cu Contacted Si Nanowire Anodes for Li-Ion Batteries Made in a Production Near Process

Anodically etching macropores in Si substrates followed by chemical over-etching and Cu galvanics allows producing Si nanowire anodes for Li ion batteries with optimized geometry. First tests of these electrodes in batteries yielded very good results with respect to capacity, cycle stability, and ir...

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Bibliographic Details
Main Authors: Föll, Helmut, Carstensen, Juergen, Ossei-Wusu, Emmanuel, Cojocaru, Ala, Quiroga-González, Enrique, Neumann, Gerold
Format: Conference Proceeding
Language:English
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Summary:Anodically etching macropores in Si substrates followed by chemical over-etching and Cu galvanics allows producing Si nanowire anodes for Li ion batteries with optimized geometry. First tests of these electrodes in batteries yielded very good results with respect to capacity, cycle stability, and irreversible Li losses. This paper focuses on the optimizations of the process chain. Processing times for key process could be substantially reduced while concomitantly improving the quality and the process window. Problems like Li leakage into the Si substrate have been eliminated. The process chain now is close to enabling mass production on 200 mm wafers.
ISSN:1938-5862
1938-6737
DOI:10.1149/1.3565509