Air-Based Deposition of Conductive Nitride Thin Films by Sputtering

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2011, Vol.158 (6), p.P75
Main Authors: Chan, Mu-Hsuan, Lu, Fu-Hsing
Format: Article
Language:English
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ISSN:0013-4651
DOI:10.1149/1.3571037