Study on the Thermal Oxidation of Photonic Crystals for Sensor Applications

Porous silicon photonic crystals with microcavities were fabricated and oxidized thermally to apply them as sensor devices. It has been found that the devices oxidized thermally over longer periods than 10 minutes are not suitable to be used as sensor devices, because they lose the features of its p...

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Bibliographic Details
Main Authors: Huanca, Danilo R., Elias, Vinícius F., Salcedo, Walter J.
Format: Conference Proceeding
Language:English
Online Access:Get full text
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Summary:Porous silicon photonic crystals with microcavities were fabricated and oxidized thermally to apply them as sensor devices. It has been found that the devices oxidized thermally over longer periods than 10 minutes are not suitable to be used as sensor devices, because they lose the features of its photonic band gap and resonance peak when these ones are immersed in organic solvent environment. However, short periods of oxidation provide well-passivated photonic structures that can be used successfully as optical sensor devices since they show a linear response between the resonance peak position and the organic solvent refractive index.
ISSN:1938-5862
1938-6737
DOI:10.1149/1.3615209