Single-Ended Surface Acoustic Wave Pressure Resonators

• Published in: ECS journal of solid state science and technology 2024-11, Vol.13 (11), p.117002
• Main Authors: Hu, Yusong, Yuan, Rui, Fu, Hao, Xu, Zhangliang
• Format: Article
• Language: English
• Subjects: finite element method; microfabrication; pressure; resonator; sensors; surface acoustic wave
• ISSN: 2162-8769; 2162-8777
• DOI: 10.1149/2162-8777/ad8c80

Surface acoustic wave (SAW) sensors exhibit advantageous attributes for pressure detection, including compact dimensions, cost-effectiveness, facile integration, elevated sensitivity, and a high quality factor ( Q value). In this study, the single-ended resonant configuration of SAW pressure sensing element based on ST-X cut quartz was simulated and fabricated. The influence of the interdigitated transducer (IDT) and applied pressure on the resonance frequency of SAW were simulated and analyzed. The designed phase velocity (3159.344 m s −1 ) without IDT is closest to the theoretical phase velocity (3158 m s −1 ) of SAW propagation in the substrate, and the relative error is about 0.043%. The designed phase velocity of SAW dropped to 3149.198 m s −1 due to the loading of the IDT mass. With an increase in applied pressure from 0 to 350 kPa, the resonance frequency of the SAW decreases from 157.05 to 154.02 MHz, yielding a maximum linear pressure sensitivity of approximately 8.6 kHz kPa −1 . The measured center frequencies of the fabricated single-ended SAW devices are predominantly clustered around 157 MHz, exhibiting a deviation of 0.46 MHz from the simulated results. The present work establishes a foundation for subsequent experimental investigations into pressure sensing.