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Electric and Magnetic Properties of Atomic Layer Deposited ZrO 2 -HfO 2 Thin Films

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Bibliographic Details
Published in:	ECS journal of solid state science and technology 2018, Vol.7 (9), p.N117-N122
Main Authors:	Kalam, Kristjan, Seemen, Helina, Mikkor, Mats, Ritslaid, Peeter, Stern, Raivo, Dueñas, Salvador, Castán, Helena, Tamm, Aile, Kukli, Kaupo
Format:	Article
Language:	English
Citations:	Items that this one cites Items that cite this one
Online Access:	Get full text
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