Fabrication of Porous Si Particles by Electrochemical Etching

Nanoporous Si particles were fabricated by the electrochemical etching of closely packed Si particles in an electrolyte containing HF. The geometrical structures of the obtained porous layers on the surface of the particles could be controlled by adjusting the preparation conditions. The process rep...

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Bibliographic Details
Published in:ECS solid state letters 2013-01, Vol.2 (12), p.P117-P119
Main Authors: Yanagishita, Takashi, Imaizumi, Masahiko, Nishio, Kazuyuki, Masuda, Hideki
Format: Article
Language:English
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Summary:Nanoporous Si particles were fabricated by the electrochemical etching of closely packed Si particles in an electrolyte containing HF. The geometrical structures of the obtained porous layers on the surface of the particles could be controlled by adjusting the preparation conditions. The process reported here is effective for the high-throughput preparation of nanoporous Si particles with controlled geometrical structures.
ISSN:2162-8742
2162-8750
DOI:10.1149/2.008312ssl