Water Outlet Design of Wet Cleaning Bath for 300-mm Diameter Silicon Wafers

Water motions influenced by an outlet of a batch-type 300-mm diameter silicon wafer wet cleaning bath were experimentally and numerically studied in order to quickly remove the contaminants from the bath. The outlet consisting of a pinhole arrays (PA) near the top edge of the bath side wall was desi...

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Bibliographic Details
Published in:ECS journal of solid state science and technology 2018, Vol.7 (9), p.N123-N127
Main Authors: Matsuo, Miya, Miyazaki, Kento, Habuka, Hitoshi, Goto, Akihiro
Format: Article
Language:English
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Summary:Water motions influenced by an outlet of a batch-type 300-mm diameter silicon wafer wet cleaning bath were experimentally and numerically studied in order to quickly remove the contaminants from the bath. The outlet consisting of a pinhole arrays (PA) near the top edge of the bath side wall was designed and evaluated along with an ordinary overflow (OF) outlet. The experiment showed that the amount of a blue-colored ink, used as a tracer, in the bath having both the OF- and the PA-outlets decreased faster than that in the bath having only the OF-outlet. Simultaneously, the amount of the blue-colored ink that returned to the bath bottom was reduced by using both the PA-outlet and the OF-outlet. The numerical calculations also showed that particles in the bath quickly went out through the PA-outlet.
ISSN:2162-8769
2162-8769
2162-8777
DOI:10.1149/2.0171809jss