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Communication—Selective Adsorption of PEG on SiO 2 for High Removal Selectivity in Tungsten CMP

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Bibliographic Details
Published in:	ECS journal of solid state science and technology 2018, Vol.7 (3), p.P132-P134
Main Authors:	Kim, Kijung, Lee, Kangchun, So, Sounghyun, Cho, Sungwook, Lee, Myeongjae, You, Keungtae, Moon, Jinok, Song, Taeseup
Format:	Article
Language:	English
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Online Access:	Get full text
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