Communication—Selective Adsorption of PEG on SiO 2 for High Removal Selectivity in Tungsten CMP

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Published in:ECS journal of solid state science and technology 2018, Vol.7 (3), p.P132-P134
Main Authors: Kim, Kijung, Lee, Kangchun, So, Sounghyun, Cho, Sungwook, Lee, Myeongjae, You, Keungtae, Moon, Jinok, Song, Taeseup
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Language:English
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doi_str_mv 10.1149/2.0251803jss
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source Institute of Physics:Jisc Collections:IOP Publishing Read and Publish 2024-2025 (Reading List)
title Communication—Selective Adsorption of PEG on SiO 2 for High Removal Selectivity in Tungsten CMP
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