Chemical and Morphological Characteristics of ALD Al 2 O 3 Thin-Film Surfaces after Immersion in pH Buffer Solutions

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2013, Vol.160 (10), p.B201-B206
Main Authors: Reyes, Joel Molina, Perez Ramos, Berni M., Islas, Carlos Zuñiga, Arriaga, Wilfrido Calleja, Quintero, Pedro Rosales, Jacome, Alfonso Torres
Format: Article
Language:English
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ISSN:0013-4651
1945-7111
DOI:10.1149/2.060310jes