Electrochemical Studies of W Corrosion for Low Resistive Contact in the 28 nm Technology Node

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2012-01, Vol.159 (2), p.H162-H165
Main Authors: Hsu, Chia-Lin, Perng, Dung-Ching, Chen, Yen-Ming, Huang, Shu-Min, Li, Yu-Ting, Kung, Chang-Hung, Chih-Hsun, Lin, Yang, Yu-Ru, Lin, Chin-Fu, Huang, Climbing, Wu, J. Y.
Format: Article
Language:English
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ISSN:0013-4651
1945-7111
DOI:10.1149/2.094202jes