Electrostatically Actuated 3C-SiC MEMS for Frequency Mixing

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Bibliographic Details
Published in:Journal of mechatronics 2012-06, Vol.1 (1), p.21-24
Main Author: Hassan, Musaab
Format: Article
Language:English
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ISSN:2326-2885
DOI:10.1166/jom.2012.1005