Optical properties of antireflective flat or rough patterned topped silicon cones gratings

Achieving a broadband antireflection property from material surfaces is one of the highest priorities in photosensing applications. To demonstrate a low reflectance, we are concerned with the study of the optical response of flat-, patterned- and rough-top silicon cone gratings. Based on previous wo...

Full description

Saved in:
Bibliographic Details
Published in:Advanced device materials 2015-01, Vol.1 (1), p.23-26
Main Authors: Le Rouzo, Judikaël, Brückner, Jean-Baptiste, Ferchichi, Abdelkerim, Gourgon, Cécile, Berginc, Gérard, Escoubas, Ludovic
Format: Article
Language:English
Subjects:
Antireflection coatings
Broadband
Cones
Diffraction gratings
Engineering Sciences
Materials science
Micro and nanotechnologies
Microelectronics
Optical properties
Optics
Photonic
Scattering
Silicon
Silicon pyramidal structures
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Achieving a broadband antireflection property from material surfaces is one of the highest priorities in photosensing applications. To demonstrate a low reflectance, we are concerned with the study of the optical response of flat-, patterned- and rough-top silicon cone gratings. Based on previous work exploring pyramid gratings, we first designed several flat top structures that theoretically demonstrate an antireflective character within the middle infrared region. In order to extend the antireflective properties up to the visible wavelengths, patterned- and rough-topped cones have been fabricated as well. Optical characterizations of several samples were carried out in the visible and mid infrared range, in order to determine the effect of structuration on the performances of the different cones gratings.
ISSN:2055-0308
2055-0316
DOI:10.1179/2055031614Y.0000000005