A Base-Collector Architecture for SiGe HBTs using Low-Temperature CVD Epitaxy Combined with Chemical-Mechanical Polishing

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Bibliographic Details
Published in:Physica scripta 2002-01, Vol.2002 (1), p.64
Main Authors: Suvar, E, Haralson, E, Forsberg, M, Radamson, H, Wang, Y-B, Grahn, J V
Format: Article
Language:English
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ISSN:1402-4896
0031-8949
1402-4896
DOI:10.1238/Physica.Topical.101a00064