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Fabrication of Bragg Grating Structures in Silicon

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Bibliographic Details
Published in:Physica scripta 2002-01, Vol.2002 (1), p.92
Main Authors: Heimala, P, Aalto, T, Yliniemi, S, Simonen, J, Kuittinen, M, Turunen, J, Leppihalme, M
Format: Article
Language:English
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ISSN:1402-4896
0031-8949
1402-4896
DOI:10.1238/Physica.Topical.101a00092