Studies on photosensitive azido polymer. V. Synthesis of novel azido polymers for alkaline developable negative photoresist

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Bibliographic Details
Published in:Kōbunshi ronbunshū (Tokyo) 1988, Vol.45 (3), p.193-199
Main Authors: KOSEKI, Ken'ichi, OKADA, Naoki, NAKAZAWA, Keiko, YAMAOKA, Tsuguo
Format: Article
Language:Japanese
Online Access:Get full text
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ISSN:0386-2186
1881-5685
DOI:10.1295/koron.45.193